Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157750 | Plasma processing method and plasma processing apparatus | Satoshi Terakura, Masahito Mori, Taku Iwase | 2018-12-18 |
| 10056236 | Plasma processing method | Hayato Watanabe, Masahito Mori, Taku Iwase | 2018-08-21 |
| 9905431 | Dry etching method | Satoshi Terakura, Masahito Mori, Ryuta Machida | 2018-02-27 |
| 9887070 | Plasma processing apparatus and plasma processing method | Masahito Mori, Kenetsu Yokogawa, Yuusuke Takegawa, Takamasa Ichino | 2018-02-06 |