Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10141207 | Operation method of plasma processing apparatus | Yutaka Kouzuma, Hiroyuki Kobayashi, Nobuya Miyoshi, Tomoyuki Watanabe | 2018-11-27 |
| 10037909 | Plasma processing apparatus | Tooru Aramaki, Michikazu Morimoto | 2018-07-31 |
| 9887070 | Plasma processing apparatus and plasma processing method | Takao Arase, Masahito Mori, Yuusuke Takegawa, Takamasa Ichino | 2018-02-06 |