Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10141207 | Operation method of plasma processing apparatus | Hiroyuki Kobayashi, Nobuya Miyoshi, Kenetsu Yokogawa, Tomoyuki Watanabe | 2018-11-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10141207 | Operation method of plasma processing apparatus | Hiroyuki Kobayashi, Nobuya Miyoshi, Kenetsu Yokogawa, Tomoyuki Watanabe | 2018-11-27 |