Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153128 | Charged particle beam apparatus and sample elevating apparatus | Masakazu Sugaya, Yusuke Moriwaki, Koichi Terada, Nobuo Shibata, Hironori Ogawa +2 more | 2018-12-11 |
| 9905393 | Stage apparatus with braking system for lens, beam, or vibration compensation | Hironori Ogawa, Masaki Mizuochi, Motohiro TAKAHASHI, Takanori Kato | 2018-02-27 |
| 9887064 | Stage device and charged particle beam device using the same | Akira Nishioka, Masaki Mizuochi, Nobuyuki Maki | 2018-02-06 |