Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9905393 | Stage apparatus with braking system for lens, beam, or vibration compensation | Hironori Ogawa, Shuichi Nakagawa, Motohiro TAKAHASHI, Takanori Kato | 2018-02-27 |
| 9887064 | Stage device and charged particle beam device using the same | Akira Nishioka, Shuichi Nakagawa, Nobuyuki Maki | 2018-02-06 |