Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10120368 | Manufacturing adjustment system that adjusts manufacturing statuses of multiple machines | — | 2018-11-06 |
| 10066971 | Rotation angle detection apparatus having function of detecting entry of foreign substance based on frequency characteristic of signals | Shunichi Odaka, Keisuke Imai | 2018-09-04 |
| 9887064 | Stage device and charged particle beam device using the same | Masaki Mizuochi, Shuichi Nakagawa, Nobuyuki Maki | 2018-02-06 |