Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9887064 | Stage device and charged particle beam device using the same | Akira Nishioka, Masaki Mizuochi, Shuichi Nakagawa | 2018-02-06 |
| 9863470 | Motion guide apparatus and method for manufacturing the same | Shigeo Tomita, Junichi Sakai, Kaoru Hoshide, Katsunori Yamamura, Muten Iwamoto +6 more | 2018-01-09 |