Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153128 | Charged particle beam apparatus and sample elevating apparatus | Masakazu Sugaya, Yusuke Moriwaki, Koichi Terada, Nobuo Shibata, Hiroyuki Kitsunai +2 more | 2018-12-11 |
| 9905393 | Stage apparatus with braking system for lens, beam, or vibration compensation | Masaki Mizuochi, Shuichi Nakagawa, Motohiro TAKAHASHI, Takanori Kato | 2018-02-27 |