Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10094486 | Method and system for supplying a cleaning gas into a process chamber | Ramprakash Sankarakrishnan, Dale R. Du Bois, Ganesh Balasubramanian, Karthik Janakiraman, Juan Carlos Rocha-Alvarez +2 more | 2018-10-09 |
| 9982363 | Silicon wafers by epitaxial deposition | Tirunelveli S. Ravi, Andrzej Kaszuba, Quoc Truong, Jean R. Vatus | 2018-05-29 |
| 9920451 | High throughput multi-wafer epitaxial reactor | Kedarnath Sangam, Tirunelveli S. Ravi, Andrzej Kaszuba, Quoc Truong | 2018-03-20 |