Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9783888 | Atomic layer deposition head | Michael J. Sershen, Roger R. Coutu, Jill S. Becker, Mark J. Dalberth | 2017-10-10 |
| 9777371 | ALD systems and methods | Roger R. Coutu, Jill S. Becker, Eric W. Deguns | 2017-10-03 |
| 9768016 | Formation of heteroepitaxial layers with rapid thermal processing to remove lattice dislocations | Andrew M. Hawryluk, Ritwik Bhatia | 2017-09-19 |
| 9666432 | Method and apparatus for forming device quality gallium nitride layers on silicon substrates | Andrew M. Hawryluk, Daniel G. Stearns | 2017-05-30 |
| 9567670 | Method for high-velocity and atmospheric-pressure atomic layer deposition with substrate and coating head separation distance in the millimeter range | Michael J. Sershen, Roger R. Coutu, Jill S. Becker, Mark J. Dalberth | 2017-02-14 |