Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9783888 | Atomic layer deposition head | Michael J. Sershen, Ganesh Sundaram, Roger R. Coutu, Jill S. Becker | 2017-10-10 |
| 9567670 | Method for high-velocity and atmospheric-pressure atomic layer deposition with substrate and coating head separation distance in the millimeter range | Michael J. Sershen, Ganesh Sundaram, Roger R. Coutu, Jill S. Becker | 2017-02-14 |