Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9783888 | Atomic layer deposition head | Michael J. Sershen, Ganesh Sundaram, Jill S. Becker, Mark J. Dalberth | 2017-10-10 |
| 9777371 | ALD systems and methods | Jill S. Becker, Ganesh Sundaram, Eric W. Deguns | 2017-10-03 |
| 9567670 | Method for high-velocity and atmospheric-pressure atomic layer deposition with substrate and coating head separation distance in the millimeter range | Michael J. Sershen, Ganesh Sundaram, Jill S. Becker, Mark J. Dalberth | 2017-02-14 |