Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9783888 | Atomic layer deposition head | Michael J. Sershen, Ganesh Sundaram, Roger R. Coutu, Mark J. Dalberth | 2017-10-10 |
| 9777371 | ALD systems and methods | Roger R. Coutu, Ganesh Sundaram, Eric W. Deguns | 2017-10-03 |
| 9567670 | Method for high-velocity and atmospheric-pressure atomic layer deposition with substrate and coating head separation distance in the millimeter range | Michael J. Sershen, Ganesh Sundaram, Roger R. Coutu, Mark J. Dalberth | 2017-02-14 |
| 9556519 | Vapor deposition systems and methods | Douwe Johannes Monsma | 2017-01-31 |