Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9768016 | Formation of heteroepitaxial layers with rapid thermal processing to remove lattice dislocations | Ganesh Sundaram, Ritwik Bhatia | 2017-09-19 |
| 9711361 | High-efficiency line-forming optical systems and methods for defect annealing and dopant activation | Serguei Anikitchev | 2017-07-18 |
| 9666432 | Method and apparatus for forming device quality gallium nitride layers on silicon substrates | Ganesh Sundaram, Daniel G. Stearns | 2017-05-30 |
| 9613815 | High-efficiency line-forming optical systems and methods for defect annealing and dopant activation | Serguei Anikitchev | 2017-04-04 |
| 9558973 | Laser annealing systems and methods with ultra-short dwell times | Serguel Anikitchev | 2017-01-31 |
| 9559023 | Systems and methods for reducing beam instability in laser annealing | James T. McWhirter, Serguei Anikitichev, Masoud Safa | 2017-01-31 |