Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9613828 | Method of laser annealing a semiconductor wafer with localized control of ambient oxygen | Arthur W. Zafiropoulo | 2017-04-04 |
| 9559023 | Systems and methods for reducing beam instability in laser annealing | Andrew M. Hawryluk, Serguei Anikitichev, Masoud Safa | 2017-01-31 |