Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9613828 | Method of laser annealing a semiconductor wafer with localized control of ambient oxygen | James T. McWhirter | 2017-04-04 |
| 9583337 | Oxygen radical enhanced atomic-layer deposition using ozone plasma | — | 2017-02-28 |