Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9659789 | Etching method and etching apparatus | Ryuichi TAKASHIMA, Yoshinobu Ooya | 2017-05-23 |
| 9570312 | Plasma etching method | Mitsuhiro Tomura, Akinori Kitamura, Shinji Higashitsutsumi, Hiroto Ohtake, Takashi Tsukamoto | 2017-02-14 |