Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9570312 | Plasma etching method | Ryohei TAKEDA, Mitsuhiro Tomura, Akinori Kitamura, Shinji Higashitsutsumi, Hiroto Ohtake | 2017-02-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9570312 | Plasma etching method | Ryohei TAKEDA, Mitsuhiro Tomura, Akinori Kitamura, Shinji Higashitsutsumi, Hiroto Ohtake | 2017-02-14 |