MT

Mitsuhiro Tomura

TL Tokyo Electron Limited: 1 patents #266 of 744Top 40%
📍 Rifu, JP: #103 of 276 inventorsTop 40%
Overall (2017): #302,902 of 506,227Top 60%
1
Patents 2017

Issued Patents 2017

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9570312 Plasma etching method Ryohei TAKEDA, Akinori Kitamura, Shinji Higashitsutsumi, Hiroto Ohtake, Takashi Tsukamoto 2017-02-14