Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9779954 | Method for etching silicon layer and plasma processing apparatus | Eiji Suzuki | 2017-10-03 |
| 9711371 | Method of etching organic film | Kosuke Kariu, Toshihisa Ozu, Hai Woo Lee | 2017-07-18 |
| 9570312 | Plasma etching method | Ryohei TAKEDA, Mitsuhiro Tomura, Shinji Higashitsutsumi, Hiroto Ohtake, Takashi Tsukamoto | 2017-02-14 |