Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9812996 | Method for calculating distance, method for neutralizing electrostatic chuck, and processing apparatus | Kenji Nagai | 2017-11-07 |
| 9659789 | Etching method and etching apparatus | Ryohei TAKEDA, Ryuichi TAKASHIMA | 2017-05-23 |