Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9812996 | Method for calculating distance, method for neutralizing electrostatic chuck, and processing apparatus | Yoshinobu Ooya | 2017-11-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9812996 | Method for calculating distance, method for neutralizing electrostatic chuck, and processing apparatus | Yoshinobu Ooya | 2017-11-07 |