Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824864 | Plasma processing method | — | 2017-11-21 |
| 9805917 | Plasma processing method | — | 2017-10-31 |
| 9761419 | Method for controlling potential of susceptor of plasma processing apparatus | — | 2017-09-12 |
| 9754768 | Plasma processing method and plasma processing apparatus | Norikazu Yamada, Toshifumi Tachikawa | 2017-09-05 |
| 9736921 | Method for impedance matching of plasma processing apparatus | Naoyuki Umehara, Norikazu Yamada | 2017-08-15 |
| 9734992 | Plasma processing apparatus | Norikazu Yamada, Toshifumi Tachikawa, Satoru Hamaishi, Koji Itadani | 2017-08-15 |
| 9663858 | Plasma processing apparatus | Koji Itadani, Tsuyoshi Komoda | 2017-05-30 |