Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9754768 | Plasma processing method and plasma processing apparatus | Norikazu Yamada, Koichi Nagami | 2017-09-05 |
| 9734992 | Plasma processing apparatus | Norikazu Yamada, Koichi Nagami, Satoru Hamaishi, Koji Itadani | 2017-08-15 |