Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9734992 | Plasma processing apparatus | Norikazu Yamada, Toshifumi Tachikawa, Koichi Nagami, Satoru Hamaishi | 2017-08-15 |
| 9663858 | Plasma processing apparatus | Koichi Nagami, Tsuyoshi Komoda | 2017-05-30 |