Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9754768 | Plasma processing method and plasma processing apparatus | Toshifumi Tachikawa, Koichi Nagami | 2017-09-05 |
| 9734992 | Plasma processing apparatus | Toshifumi Tachikawa, Koichi Nagami, Satoru Hamaishi, Koji Itadani | 2017-08-15 |
| 9736921 | Method for impedance matching of plasma processing apparatus | Koichi Nagami, Naoyuki Umehara | 2017-08-15 |
| 9564287 | Substrate processing apparatus and substrate processing method using same | Takeshi Ohse, Shinji Himori, Jun Abe | 2017-02-07 |