Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9736921 | Method for impedance matching of plasma processing apparatus | Koichi Nagami, Norikazu Yamada | 2017-08-15 |
| 9640368 | Plasma processing apparatus | Ryuji Ohtani, Shunichi Ito, Kazutaka Sei, Tomomasa Nishida | 2017-05-02 |