Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9823585 | EUV focus monitoring systems and methods | Chih-Tsung Shih, Chieh-Jen Cheng, Jeng-Horng Chen, Chia-Chen Chen, Shinn-Sheng Yu +1 more | 2017-11-21 |
WL
Wei-Chih Lai
Overall (2017): #200,703 of 506,227Top 40%
1
Patents 2017