Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9823585 | EUV focus monitoring systems and methods | Chih-Tsung Shih, Jeng-Horng Chen, Chia-Chen Chen, Shinn-Sheng Yu, Anthony Yen +1 more | 2017-11-21 |
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Chieh-Jen Cheng
Overall (2017): #467,215 of 506,227Top 95%
1
Patents 2017