Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9768064 | Formation method of semiconductor device structure | Chun-Wei Hsu, Chi-Jen Liu, Cheng-Chun Chang, Yi-Sheng Lin | 2017-09-19 |
| 9723915 | Brush cleaning method | Fu-Ming Huang, Han-Hsin Kuo, Chi-Ming Tsai, He Hui Peng | 2017-08-08 |
| 9679848 | Interconnect structure for semiconductor devices | Han-Hsin Kuo, Chung-Chi Ko, Neng-Jye Yang, Fu-Ming Huang, Chi-Ming Tsai | 2017-06-13 |
| 9633832 | Method for metal gate surface clean | Shich-Chang Suen, Li-Chieh Wu, Chi-Jen Liu, He Hui Peng, Yung-Chung Chen | 2017-04-25 |
| 9630295 | Mechanisms for removing debris from polishing pad | He Hui Peng, Fu-Ming Huang, Shich-Chang Suen, Han-Hsin Kuo, Chi-Ming Tsai | 2017-04-25 |
| 9564511 | Oxidation and etching post metal gate CMP | Chi-Jen Liu, Li-Chieh Wu, Shich-Chang Suen | 2017-02-07 |
| 9553161 | Mechanism for forming metal gate structure | Chi-Jen Liu, Li-Chieh Wu, Shich-Chang Suen | 2017-01-24 |