Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9633832 | Method for metal gate surface clean | Shich-Chang Suen, Chi-Jen Liu, He Hui Peng, Liang-Guang Chen, Yung-Chung Chen | 2017-04-25 |
| 9564511 | Oxidation and etching post metal gate CMP | Chi-Jen Liu, Liang-Guang Chen, Shich-Chang Suen | 2017-02-07 |
| 9553161 | Mechanism for forming metal gate structure | Chi-Jen Liu, Shich-Chang Suen, Liang-Guang Chen | 2017-01-24 |