Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9723915 | Brush cleaning method | Fu-Ming Huang, Liang-Guang Chen, Han-Hsin Kuo, Chi-Ming Tsai | 2017-08-08 |
| 9630295 | Mechanisms for removing debris from polishing pad | Fu-Ming Huang, Shich-Chang Suen, Han-Hsin Kuo, Chi-Ming Tsai, Liang-Guang Chen | 2017-04-25 |
| 9633832 | Method for metal gate surface clean | Shich-Chang Suen, Li-Chieh Wu, Chi-Jen Liu, Liang-Guang Chen, Yung-Chung Chen | 2017-04-25 |