Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9802292 | Advanced polishing system | Che-Liang Chung, Chun-Kai Tai, Wei-Chen Hsiao | 2017-10-31 |
| 9630295 | Mechanisms for removing debris from polishing pad | He Hui Peng, Fu-Ming Huang, Han-Hsin Kuo, Chi-Ming Tsai, Liang-Guang Chen | 2017-04-25 |
| 9633832 | Method for metal gate surface clean | Li-Chieh Wu, Chi-Jen Liu, He Hui Peng, Liang-Guang Chen, Yung-Chung Chen | 2017-04-25 |
| 9564511 | Oxidation and etching post metal gate CMP | Chi-Jen Liu, Li-Chieh Wu, Liang-Guang Chen | 2017-02-07 |
| 9553161 | Mechanism for forming metal gate structure | Chi-Jen Liu, Li-Chieh Wu, Liang-Guang Chen | 2017-01-24 |