Issued Patents 2017
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9822060 | Compound, resin, resist composition and method for producing resist pattern | Tatsuro Masuyama, Satoshi Yamamoto | 2017-11-21 |
| 9809669 | Salt, resin, resist composition and method for producing resist pattern | Hiromu Sakamoto | 2017-11-07 |
| 9791776 | Resist composition and method for producing resist pattern | Takahiro Yasue, Yuichi Mukai | 2017-10-17 |
| 9771346 | Salt, acid generator, resist composition and method for producing resist pattern | Takayuki Miyagawa, Yukako Anryu | 2017-09-26 |
| 9758466 | Compound, resin, resist composition and method for producing resist pattern | Mitsuyoshi Ochiai, Masahiko Shimada | 2017-09-12 |
| 9760005 | Salt, acid generator, resist composition and method for producing resist pattern | Tatsuro Masuyama, Shingo Fujita | 2017-09-12 |
| 9740102 | Photoresist composition and method for producing photoresist pattern | Tatsuro Masuyama, Shingo Fujita | 2017-08-22 |
| 9726976 | Photoresist composition | Hiromu Sakamoto, Masako Sugihara, Takashi Hiraoka | 2017-08-08 |
| 9726974 | Resin, photoresist composition, and method for producing photoresist pattern | Mitsuyoshi Ochiai, Masafumi Yoshida | 2017-08-08 |
| 9671691 | Resin, resist composition and method for producing resist pattern | Masahiko Shimada, Yuki SUZUKI | 2017-06-06 |
| 9671693 | Resist composition and method for producing resist pattern | Takashi Hiraoka, Shingo Fujita | 2017-06-06 |
| 9671692 | Compound, resin and photoresist composition | Tatsuro Masuyama, Satoshi Yamaguchi | 2017-06-06 |
| 9645490 | Salt, acid generator, photoresist composition, and method for producing photoresist pattern | Yukako Anryu | 2017-05-09 |
| 9644056 | Compound, resin and photoresist composition | Tatsuro Masuyama, Yuki SUZUKI | 2017-05-09 |
| 9638997 | Resist composition and method for producing resist pattern | Tatsuro Masuyama, Shingo Fujita | 2017-05-02 |
| 9638996 | Resist composition and method for producing resist pattern | Tatsuro Masuyama, Takahiro Yasue | 2017-05-02 |
| 9612533 | Salt and photoresist composition comprising the same | Tatsuro Masuyama, Satoshi Yamamoto | 2017-04-04 |
| 9599897 | Salt, resin, resist composition and method for producing resist pattern | Takashi Nishimura, Yuko Mukai | 2017-03-21 |
| 9580402 | Salt, acid generator, photoresist composition, and method for producing photoresist pattern | Hiromu Sakamoto | 2017-02-28 |
| 9575408 | Photoresist composition and method for producing photoresist pattern | Mitsuyoshi Ochiai | 2017-02-21 |
| 9562032 | Salt and photoresist composition comprising the same | Tatsuro Masuyama, Masafumi Yoshida | 2017-02-07 |
| 9563125 | Resist composition and method for producing resist pattern | Tatsuro Masuyama, Yuichi Mukai | 2017-02-07 |
| 9563124 | Photoresist composition and method for producing photoresist pattern | Tatsuro Masuyama, Satoshi Yamaguchi | 2017-02-07 |
| 9563123 | Photoresist composition, compound and process of producing photoresist pattern | Tatsuro Masuyama, Shingo Fujita | 2017-02-07 |
| 9562122 | Compound, resin, resist composition and method for producing resist pattern | Tatsuro Masuyama, Satoshi Yamamoto | 2017-02-07 |