Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9771346 | Salt, acid generator, resist composition and method for producing resist pattern | Takayuki Miyagawa, Koji Ichikawa | 2017-09-26 |
| 9645490 | Salt, acid generator, photoresist composition, and method for producing photoresist pattern | Koji Ichikawa | 2017-05-09 |