Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9760005 | Salt, acid generator, resist composition and method for producing resist pattern | Tatsuro Masuyama, Koji Ichikawa | 2017-09-12 |
| 9740102 | Photoresist composition and method for producing photoresist pattern | Tatsuro Masuyama, Koji Ichikawa | 2017-08-22 |
| 9671693 | Resist composition and method for producing resist pattern | Koji Ichikawa, Takashi Hiraoka | 2017-06-06 |
| 9638997 | Resist composition and method for producing resist pattern | Tatsuro Masuyama, Koji Ichikawa | 2017-05-02 |
| 9563123 | Photoresist composition, compound and process of producing photoresist pattern | Tatsuro Masuyama, Koji Ichikawa | 2017-02-07 |