Issued Patents 2017
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9822060 | Compound, resin, resist composition and method for producing resist pattern | Satoshi Yamamoto, Koji Ichikawa | 2017-11-21 |
| 9760005 | Salt, acid generator, resist composition and method for producing resist pattern | Shingo Fujita, Koji Ichikawa | 2017-09-12 |
| 9740102 | Photoresist composition and method for producing photoresist pattern | Shingo Fujita, Koji Ichikawa | 2017-08-22 |
| 9671692 | Compound, resin and photoresist composition | Satoshi Yamaguchi, Koji Ichikawa | 2017-06-06 |
| 9644056 | Compound, resin and photoresist composition | Yuki SUZUKI, Koji Ichikawa | 2017-05-09 |
| 9638996 | Resist composition and method for producing resist pattern | Takahiro Yasue, Koji Ichikawa | 2017-05-02 |
| 9638997 | Resist composition and method for producing resist pattern | Shingo Fujita, Koji Ichikawa | 2017-05-02 |
| 9612533 | Salt and photoresist composition comprising the same | Koji Ichikawa, Satoshi Yamamoto | 2017-04-04 |
| 9562122 | Compound, resin, resist composition and method for producing resist pattern | Satoshi Yamamoto, Koji Ichikawa | 2017-02-07 |
| 9563125 | Resist composition and method for producing resist pattern | Yuichi Mukai, Koji Ichikawa | 2017-02-07 |
| 9563124 | Photoresist composition and method for producing photoresist pattern | Satoshi Yamaguchi, Koji Ichikawa | 2017-02-07 |
| 9563123 | Photoresist composition, compound and process of producing photoresist pattern | Shingo Fujita, Koji Ichikawa | 2017-02-07 |
| 9562032 | Salt and photoresist composition comprising the same | Koji Ichikawa, Masafumi Yoshida | 2017-02-07 |