Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9809669 | Salt, resin, resist composition and method for producing resist pattern | Koji Ichikawa | 2017-11-07 |
| 9726976 | Photoresist composition | Koji Ichikawa, Masako Sugihara, Takashi Hiraoka | 2017-08-08 |
| 9580402 | Salt, acid generator, photoresist composition, and method for producing photoresist pattern | Koji Ichikawa | 2017-02-28 |