Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9740100 | Hemiacetal compound, polymer, resist composition, and patterning process | Koji Hasegawa, Masayoshi Sagehashi, Masahiro Fukushima | 2017-08-22 |
| 9703193 | Onium salt, resist composition, and patterning process | Takayuki Fujiwara, Masaki Ohashi | 2017-07-11 |