Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9703193 | Onium salt, resist composition, and patterning process | Takayuki Fujiwara, Ryosuke Taniguchi | 2017-07-11 |
| 9663593 | Polymer compound for a conductive polymer and method for producing same | Jun Hatakeyama, Takayuki Nagasawa, Koji Hasegawa, Masayoshi Sagehashi | 2017-05-30 |
| 9665002 | Onium salt compound, resist composition, and pattern forming process | Masahiro Fukushima, Jun Hatakeyama | 2017-05-30 |
| 9645491 | Sulfonium salt, chemically amplified resist composition, and patterning process | Takayuki Fujiwara | 2017-05-09 |