Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9790166 | Polymer, monomer, resist composition, and patterning process | Masayoshi Sagehashi, Koji Hasegawa, Masahiro Fukushima, Jun Hatakeyama | 2017-10-17 |
| 9758609 | Monomer, polymer, resist composition, and patterning process | Masayoshi Sagehashi, Koji Hasegawa, Jun Hatakeyama | 2017-09-12 |
| 9632415 | Pattern forming process and shrink agent | Jun Hatakeyama, Koji Hasegawa, Masayoshi Sagehashi | 2017-04-25 |
| 9618850 | Pattern forming process and shrink agent | Jun Hatakeyama, Koji Hasegawa, Kenji Funatsu | 2017-04-11 |