Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9778568 | Positive resist composition and patterning process | Akihiko Seki | 2017-10-03 |
| 9618850 | Pattern forming process and shrink agent | Jun Hatakeyama, Kazuhiro Katayama, Koji Hasegawa | 2017-04-11 |
| 9551932 | Patterning process and resist composition | Kentaro Kumaki, Akihiro Seki, Tomohiro Kobayashi, Koji Hasegawa | 2017-01-24 |