Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9740098 | Chemically amplified negative resist composition using novel onium salt and resist pattern forming process | Keiichi Masunaga, Satoshi Watanabe, Masaaki Kotake, Takayuki Fujiwara | 2017-08-22 |
| 9720323 | Chemically amplified positive resist composition and pattern forming process | Masaaki Kotake, Takayuki Fujiwara, Keiichi Masunaga, Satoshi Watanabe | 2017-08-01 |
| 9709890 | Resist composition and patterning process | Jun Hatakeyama, Masayoshi Sagehashi, Koji Hasegawa | 2017-07-18 |
| 9645493 | Negative resist composition and pattern forming process | Keiichi Masunaga, Satoshi Watanabe | 2017-05-09 |
| 9632417 | Shrink material and pattern forming process | Kentaro Kumaki, Satoshi Watanabe, Jun Hatakeyama | 2017-04-25 |
| 9604921 | Sulfonium salt, resist composition and resist pattern forming process | Satoshi Watanabe, Keiichi Masunaga, Masahiro Fukushima | 2017-03-28 |
| 9535325 | Onium salt, chemically amplified positive resist composition, and patterning process | Keiichi Masunaga, Satoshi Watanabe, Masahiro Fukushima, Koji Hasegawa | 2017-01-03 |