Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9740098 | Chemically amplified negative resist composition using novel onium salt and resist pattern forming process | Keiichi Masunaga, Satoshi Watanabe, Daisuke Domon, Takayuki Fujiwara | 2017-08-22 |
| 9720323 | Chemically amplified positive resist composition and pattern forming process | Takayuki Fujiwara, Keiichi Masunaga, Daisuke Domon, Satoshi Watanabe | 2017-08-01 |