Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9811096 | Liquid feeding device and substrate treating device | Takashi Ootagaki, Emi Matsui | 2017-11-07 |
| 9795999 | Substrate processing apparatus and substrate processing method | Takashi Ootagaki, Yosuke Himori | 2017-10-24 |
| 9741596 | Bonding apparatus and bonding process method | Emi Matsui | 2017-08-22 |
| 9694371 | Substrate treatment apparatus and substrate treatment method | Takashi Ootagaki | 2017-07-04 |
| 9607865 | Substrate processing device and substrate processing method | Masaaki Furuya, Takashi Ootagaki, Yuji Nagashima, Atsushi Kinase, Masahiro Abe | 2017-03-28 |
| 9586391 | Bonding apparatus and method for manufacturing bonded substrate | Daisuke Matsushima | 2017-03-07 |
| 9553003 | Substrate processing device and substrate processing method | Masaaki Furuya, Takashi Ootagaki, Yuji Nagashima, Atsushi Kinase, Masahiro Abe | 2017-01-24 |