Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9795999 | Substrate processing apparatus and substrate processing method | Takashi Ootagaki, Konosuke Hayashi | 2017-10-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9795999 | Substrate processing apparatus and substrate processing method | Takashi Ootagaki, Konosuke Hayashi | 2017-10-24 |