Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9607865 | Substrate processing device and substrate processing method | Konosuke Hayashi, Masaaki Furuya, Takashi Ootagaki, Atsushi Kinase, Masahiro Abe | 2017-03-28 |
| 9553003 | Substrate processing device and substrate processing method | Konosuke Hayashi, Masaaki Furuya, Takashi Ootagaki, Atsushi Kinase, Masahiro Abe | 2017-01-24 |