Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9679787 | Spin treatment apparatus | — | 2017-06-13 |
| 9607865 | Substrate processing device and substrate processing method | Konosuke Hayashi, Takashi Ootagaki, Yuji Nagashima, Atsushi Kinase, Masahiro Abe | 2017-03-28 |
| 9553003 | Substrate processing device and substrate processing method | Konosuke Hayashi, Takashi Ootagaki, Yuji Nagashima, Atsushi Kinase, Masahiro Abe | 2017-01-24 |