Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9811096 | Liquid feeding device and substrate treating device | Konosuke Hayashi, Takashi Ootagaki | 2017-11-07 |
| 9741596 | Bonding apparatus and bonding process method | Konosuke Hayashi | 2017-08-22 |
| 9718710 | Treatment apparatus and method for reusing treatment liquid | Masaaki Hirakawa | 2017-08-01 |