Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831323 | Structure and method to achieve compressively strained Si NS | Jorge A. Kittl, Robert C. Bowen, Borna J. Obradovic, Mark S. Rodder | 2017-11-28 |
| 9728502 | Metal oxysilicate diffusion barriers for damascene metallization with low RC delays and methods for forming the same | Mark S. Rodder, Rwik Sengupta, Chris Bowen | 2017-08-08 |
| 9634140 | Fabricating metal source-drain stressor in a MOS device channel | Jorge A. Kittl, Mark S. Rodder | 2017-04-25 |
| 9613907 | Low resistivity damascene interconnect | Mark S. Rodder, Jorge A. Kittl, Robert C. Bowen | 2017-04-04 |